Thanks for your response.
I solved the error by changing the source code of combine (module_file.F), making clean, and making combine again.
You should modify the lines 194-195 of module_file.F
from
if( XCELL.ne.XCELL3D ) valid = .false. ! width of cell
if( YCELL.ne.YCELL3D ) valid = .false. ! height of cell
to
if( abs (XCELL-XCELL3D).gt.(1e-5) ) valid = .false. ! width of cell
if( abs (YCELL-YCELL3D).gt.(1e-5) ) valid = .false. ! height of cell
I should say if someone has the error again, they can change 1e-5 to 1e-2.